The VAT Slit Valve Plate 0190-09662 is a precision-machined replacement component designed for Applied Materials P5000 semiconductor processing equipment. It forms a critical part of the slit valve assembly, providing reliable wafer transfer sealing, precise chamber isolation, and stable operation in vacuum processing environments.
Manufactured with high machining accuracy and excellent surface quality, this slit valve plate helps maintain chamber integrity, reduce particle generation, and support long-term equipment reliability during semiconductor manufacturing.
Product Features
- Precision-machined replacement part
- Compatible with Applied Materials P5000 equipment
- High dimensional accuracy
- Excellent surface finish
- Stable vacuum sealing performance
- Durable aluminum alloy construction
- Low particle generation
- Suitable for semiconductor cleanroom environments
Product Specifications
| Item | Specification |
|---|---|
| Product Name | VAT Slit Valve Plate |
| Part Number | 0190-09662 |
| Equipment | Applied Materials P5000 |
| Application | Slit Valve Assembly |
| Industry | Semiconductor Manufacturing |
| Condition | Replacement Part |
Applications
The VAT Slit Valve Plate 0190-09662 is widely used in semiconductor fabs and equipment service facilities for:
- P5000 equipment maintenance
- Vacuum chamber refurbishment
- Preventive maintenance (PM)
- Semiconductor equipment repair
- Equipment spare parts replacement
Advantages
- Ensures reliable chamber sealing performance
- Maintains stable wafer transfer operation
- High machining precision for accurate installation
- Helps reduce unexpected equipment downtime
- Supports long service life under production conditions
Why Choose JUNR
JUNR specializes in semiconductor equipment refurbishment, spare parts supply, and technical service. We provide high-quality replacement parts for Applied Materials, TEL, TSK, and other leading semiconductor equipment platforms.
- Professional semiconductor equipment experience
- Strict quality inspection
- Fast global delivery
- Technical support
- Comprehensive spare parts solutions
Request a Quote
Looking for VAT Slit Valve Plate 0190-09662 for your Applied Materials P5000 system?
Contact our technical team today for pricing, availability, lead time, and professional support.
